Major 200mm Wafer Metrology Tools

• KLA Tencor UV1080 spectroscopic reflectometer
• KLA Tencor Alpha-Step 500 profilometer
• KLA Tencor FLX-2320 film stress probe
• Lucas Signatone automated 4 point probe 

Analytical Capabilities

• Transmission Electron Microscope (TEM)
  
  
  • JEOL 200CX TEM: low resolution transmission electron microscope
    
  • JEOL 2010F TEM: field emission source, EELS & EDXS options; high-resolution transmission electron microscope
    
    
• Scanning Electron Microscope (SEM)
  
  
  • LEO 1550 SEM (6" sample size): field emission source, EDXS & WDS options; scanning electron microscope
    
  • Hitachi S-4000 SEM (~2" sample size): scanning electron microscope; field emission source, EDXS detector option
    
    
• Atomic Force Microscopy (AFM)
  
  
  • Digital Instruments Nanoscope III SPM: scanning probe microscope for STM & AFM
    
  • JEOL JSPM-4200 SPM: scanning probe microscope for STM, AFM, UFM; UHV stage, Temperature controlled stage
    
  • Digital Equipment Nanoscope SPM): scanning probe microscope for STM, AFM, UFM; external coordinate-file location option
    
  • Molecular Imaging Picoscan SPM: scanning probe microscope for STM, AFM, CS-AFM, MAG-AFM;
    
    
• Secondary Ion Mass Spectrometer (SIMS)
  
  
  • Phi 6300 Quadrapole dynamic SIMS: secondary-ion mass spectrometry, depth profiling option; Cs ion & O ion sources
    
  • Phi 7200 ToF/SALI system: static secondary-ion mass spectrometry
    
    
• Auger Electron Spectrometry (AES)
  
  
  • Phi AES: Auger electron spectrometry, depth profiling capabilities
    
  • Phi 600 SAM:scanning Auger multiprobe for AES, imaging
    
    
• X-ray Photoelectron Spectrometry (XPS) Phi XPS/ESCA system: X-ray photoelectron spectrometry, depth profiling option
  
  
• Focused Ion Beam Microscope (FIB) FEI FIB-200 focused ion milling & scanning electron microscope; Ga ion source, Pt deposition
  
  
• Linear Accelerator
  
  
  • Rutherford back-scattering (RBS) analysis
    
  • Nuclear-reaction analysis (NRA - H, F, ect.)
    
    
• X-Ray Analysis System
  
  
  • Scintag XDS 2000 XRD: thin-film & powder X-ray diffraction patterns
    
  • Custom X-ray analysis system: Rigaku RU300 rotating anode source, INEI CPS 120 array detector, Huber goniometer; thin-film & powder X-ray diffraction patterns
    
    
• Sample Preparation Tools
  
  
  • Anatech Hummer 10.2 sputter coating tool
    
  • Deton Vacuum, Desk II sputter coating tool
    
  • Fischione model 1020 plasma cleaner
    
    
• Others
  
  
  • Signatone sheet-resistance probe
    
  • Romulus II stud-pull adhesions tester
    
  • Nicolet Magna 750II FTIR:infrared spectrometry