People - Staff - Kathleen Dunn

Kathleen Dunn

Professional Background
Research Description
Publications/Patents
Presentations

Assistant Professor of Nanoscience
Research areas: Electron microscopy, ion microscopy liners, metallization, defects in metals, ultrafine wires

Watch Professor Dunn's "Inside CNSE" video interview on the capabilities of the transmission electron microscope

Listen to Professor Dunn's interview on SCIENCE AND SOCIETY

Professional Background

Ph.D. Materials Science, University of Wisconsin-Madison, 2001
M.S. Materials Science, University of Wisconsin-Madison, 1997
B.S. Applied & Engineering Physics, Cornell University, 1991

Research Description
Professor Dunn's research group has two main foci: the extension of traditional metal-based interconnects to the nanoscale regime as well as novel materials for next generation wiring schemes for semiconductor applications. In order to characterize such nanostructures, Dunn's group has also become involved in the development of electron and ion based characterization techniques.

The extension of conventional metals to the ultrafine regime (where the wire width approaches the mean free path of an electron) encounters both morphological as well as quantum mechanical effects that impact the conductivity of the metal wire. In the extreme case of atomic conductors, where a wire may be only one or two atoms wide, the conductivity is actually quantized. Dunn's team studies these wires using a specially modified transmission electron microscope (TEM) holder with connections which allow simultaneous electrical measurements. Other students working in this area are looking for novel means for controlling interfacial energies as a means to controlling nucleation and growth, while still others are investigating the microstructural origin of killer defects such as electromigration voids using advanced characterization techniques such as electron backscatter diffraction (EBSD) and electron energy loss spectroscopy (EELS).

Novel structures we are investigating include molecular conductors such as carbon nanotubes and artifically engineered biological molecules. Finally, Dunn's group recently became involved in high temperature superconductor research, since nanoscale phenomena often control the current carrying capabilities of these wires as well.

Publications/Patents

M. V. Rane, H. Bakhru, R. Moore, E. Stinzianni, K.A. Dunn, P. Haldar, R. Feenstra, Y. Zhang and D. Christen, "Investigation of the Role of Intermediate Heat Treatment in Obtaining High J_c Films in BaF₂ Ex-situ Films," in preparation

Y. Zhu, K.A. Dunn and A.E. Kaloyeros, "Atomic layer deposition of platinum for ultra-thin seed layer applications in advanced metallization schemes," accepted for publication in J. Mat. Res.

E. Eisenbraun and K.A. Dunn, "Interconnects and Nanotechnology (Moletronics)" chapter to appear in Advanced Nanoscale ULSI Interconnects: Fundamentals and Practice

Chakrapani V. Varanasi, P.N. Barnes, J. Burke, L. Brunke, I. Maartense, T.J. Haugan, E. A. Stinzianni, K. A. Dunn, and P. Haldar, "Flux Pinning Enhancement in YBa₂Cu₃O_7-x Films with BaSnO₃ nanoparticles," Supercond. Sci. Tech. 19(10), L37-41 (2006)

R. M. Roth, D. Djukic, Y. S. Lee, R. M. Osgood, Jr, S. Bakhru, B. Laulicht, K.A. Dunn, H. Bakhru, L. Wu, and M, Huang, "Compositional and structural changes in LiNbO₃ following deep He⁺ ion implantation for film exfoliation," Appl. Phys. Lett 89(11), 112906-112909 (2006)

J.L. Rullan and K.A. Dunn, "In-situ TEM-STM Investigation of Conductance in Cu Atomic Wires," Microscopy and Microanalysis 12(Suppl. 2), 1282 (2006)

K.A. Dunn, C. Breslin, and B.L. Thiel, "The Influence of Ga+ Ion Dose on Deposition Rate and Purity of Pt Films," Microscopy and Microanalysis 12(Suppl. 2), 706 (2006)

C. Awo-Affouda, M. Bolduc, M.B. Huang, F. Ramos, K.A. Dunn, B. Thiel, G. Agnello and V.P. LaBella, "Observation of crystallite formation in ferromagnetic Mn-implanted Si," J. Vac. Sci. Tech. A 24(4), 1644-1647 (2006)

O. van der Straten, Y. Zhu, J. Rullan, K.A. Dunn and A.E. Kaloyeros, "Study of Copper-Refractory Metal Interfaces Via Solid-State Wetting for Emerging Nanoscale Interconnect Applications," J. Mat. Res. 21(1), 255-262 (2006)

Yu Zhu, Kathleen A. Dunn, and Alain E. Kaloyeros, "Platinum Liner Deposited by Atomic Layer Deposition for Nanoscale Copper Interconnect Applications," ECS Trans. 1, (10) 63 (2006)

G. Sirinakis, R. Siddique, K.A. Dunn, H. Efstathiadis, M. Carpenter and A.E. Kaloyeros, "Spectroellipsometric characterization of Au-Y₂O₃-stabilized ZrO₂ nanocomposite films," J. Mat. Res. 20(12), 3320-8 (2005)

K.A. Dunn, B.L. Thiel, F.G. Ramos, M.B. Huang, C. Awo-Affouda, M. Bolduc and V. LaBella, "Microstructure of As-implanted and Annealed Si:Mn Dilute Magnetic Semiconductors," Microscopy and Microanalysis 11 (Suppl. 2), 1720 (2005)

K.A. Dunn and Y. Zhu, "In-situ TEM Investigation of Conductance in Bimetallic Atomic Wires," Microscopy and Microanalysis 11 (Suppl. 2), 1508 (2005)

M. Marko, C.-E. Hsieh, K.A. Dunn, D. Typke, C.A. Mannella, and J. Frank, "Use of the Zernike Phase Plate for Electron Tomography of Frozen-Hydrated Specimens," Microscopy and Microanalysis 11 (Suppl. 2), 310 (2005)

"Properties of Ultra-thin Platinum Films Deposited by Atomic Layer Deposition," Y. Zhu, K.A. Dunn and A.E. Kaloyeros, Proc. AVS 5^th International Conf. on Atomic Layer Deposition, (2005)

"Optical Properties of Nanoparticulate Metallic Silver in Photothermographic Imaging Materials," J. Imaging Sci. and Technol. 49(4), 370-380 (2005)

"Probing the Nature of Developed Silver in Photothermographic Media," S. Chen, T.N. Blanton, D.R. Whitcomb, L. Burleva and K.A. Dunn, J. Imaging Sci. and Technol. 49 (4), 365-369 (2005)

O. van der Straten, Y. Zhu, K.A. Dunn, E. Eisenbraun and A.E. Kaloyeros, "Atomic Layer Deposition of Tantalum Nitride for Ultra-thin Liner Applications in Advanced Copper Metallization Schemes," J. Mat. Res. 19(2), 447-453 (2004)

F. Shahedipour-Sandvik, M. Jamil, K. Topol, J. Grandusky, and K.A. Dunn, "Origin of ring defects in high In content green InGaN/GaN MQW: an ultrasonic force microscopy study," MRS Internet J. Nitride Semicond. Res. 10, 4(2005)

A. Topol, K.A. Dunn, K. Barth, G. Nuesca, B. Taylor, K. Dovidenko, A.E. Kaloyeros, R.T. Tuenge, and C.N. Kin, "Chemical Vapor Deposition of ZnS:Mn for Thin Film Electroluminescent Display Applications," J. Mat. Res. 19(3), 697-706 (2004)

A.E. Kaloyeros, K.A. Dunn, A.T. Carlsen and A.W. Topol, "Carbon Nanotube Interconnects," invited article for the Marcel Dekker Encyclopedia of NanoScience and NanoTechnology, Eds: J.A. Schwarz, C.I. Contescu, and K. PutyeraVol 1, 435-446 (2004)

O. van der Straten, Y. Zhu, J. Rullan, K. Topol, K.A. Dunn and A.E. Kaloyeros "Atomic Layer Deposition of Tantalum Nitride on Organosilicate and Organic Polymer-based Low Dielectric Constant Materials," Mat. Res. Soc. Proc. 812, F3.13 (2004)

O. van der Straten, Y. Zhu, K.A. Dunn and A.E. Kaloyeros, "Enhancement of Copper Wetting via Surfactant-based Post-treatment of Ultra-thin Atomic Layer Deposited TaN Liners," Mat. Res. Soc. Proc. 766, E10.3 (2003)

K. Dovidenko, J. Rullan, R. Moore, K.A. Dunn, R.E. Geer and F. Heuchling, "FIB-assisted Pt Deposition for Carbon Nanotube Integration and 3-D Nanoengineering," Mat. Res. Soc. Proc. 739, H7.7 (2003)

L. Muthuswami, E.S. Moyer, Z. Li, E. Thompson, K. Dunn, A. Victoria, G.S. Shekhawat and R.E. Geer, "Cross-sectional Elastic Imaging and Mechanical Defect Detection in Low-k Dielectrics in Integrated Circuit Interconnect Test Structures," Mat. Res. Soc. Proc. 716, 557 (2002)

K. A. Dunn, K. Dovidenko, A.W. Topol, G. Shekhawat, A.E. Kaloyeros, "MOCVD ZnS:Mn Films: Crystal Structure and Defect Microstructure as a Function of the Growth Parameters," Mater. Res. Soc. Symp. Proc.695, 41-46 (2002)

R. Vajtai, B.-Q. Wei, Yu. V. Shusterman, K.A. Dunn, K. Dovidenko, L.J. Schowalter, P.M. Ajayan, "Electrical Characterization of Carbon Nanotube-Metal Contacts," 15th International Vacuum Congress & American Vacuum Society, 48th International Symposium & 11th International Conference on Solid Surfaces, (2001)

K. A. Dunn, K. Dovidenko, A.W. Topol, S.R. Oktyabrsky, A.E. Kaloyeros, "MOCVD ZnS:Mn Films: Grain Size Distribution and Crystal Structure as a Function of the Growth Parameters," Mater. Res. Soc. Symp. Proc. (2001)

K.A. Dunn, S.E. Babcock, D.S. Stone, R.J. Matyi, L. Zhang, T.F. Kuech "Dislocation Arrangement in a Thick LEO GaN Film on Sapphire," MRS Internet J. Nitride Semicond. Res. 5S1, W2.11 (2000)

D.M. Hansen, P.D. Moran, K.A. Dunn, S.E. Babcock, R.J. Matyi, and T.F. Kuech, "Development of a Glass-Bonded Compliant Substrate," J. Crystal Growth 195, 144-150 (1998)

Presentations

K.A. Dunn, "Recrystallization of Copper in Restricted Geometries," invited seminar at Carnegie Mellon, Department of Materials Science & Engineering Colloquium Series, 2006

T. J. Haugan, P. N. Barnes, N. A. Pierce, F. J. Baca, I. Maartense, and T. L. Peterson , M. Rane, K. Dunn and H. Wang, "Flux Pinning and Grain Boundary Enhancements of YBCO with Nanoparticle Additions" presented at 19^th International Symposium on Superconductivity, Nagoya, Japan, October 2006

J.L. Rullan and K.A. Dunn, "In-situ TEM-STM Investigation of Conductance in Cu Atomic Wires," Microscopy and Microanalysis 2006, Chicago, Illinois (2006)

K.A. Dunn, C. Breslin, and B.L. Thiel, "The Influence of Ga+ Ion Dose on Deposition Rate and Purity of Pt Films," Microscopy and Microanalysis 2006, Chicago, Illinois (2006)

K.A. Dunn and Y. Zhu, "In-situ TEM Investigation of Conductance in Bimetallic Atomic Wires," Microscopy and Microanalysis 2005, Honolulu, Hawaii (2005)

"Properties of Ultra-thin Platinum Films Deposited by Atomic Layer Deposition," Y. Zhu, K.A. Dunn and A.E. Kaloyeros, 5^th International Conf. on Atomic Layer Deposition, San Jose, California (2005)

Yu Zhu, Kathleen A. Dunn, and Alain E. Kaloyeros, "Platinum Liner Deposited by Atomic Layer Deposition for Nanoscale Copper Interconnect Applications," 208^th Meeting of the Electrochem. Society, Los Angeles, CA (2005)

Y. Zhu, M. Elouneg-Jamroz, O. van der Straten, K.A. Dunn and A.E. Kaloyeros, "Correlating Resistivity and Nanostructure in Ultra-Fine Copper Lines," 2004 Spring Meeting of the Materials Research Society, San Francisco, CA

O. van der Straten, Y. Zhu, K.A. Dunn and A.E. Kaloyeros, "Enhancement of Copper Wetting via Surfactant-based Post-treatment of Ultra-thin Atomic Layer Deposited TaN Liners" 2003 Spring Meeting of the Materials Research Society, San Francisco, CA

K. Dovidenko, J. Rullan, R. Moore, K.A. Dunn, R.E. Geer and F. Heuchling, "FIB-assisted Pt Deposition for Carbon Nanotube Integration and 3-D Nanoengineering," Fall 2002 Meeting of the Materials Research Society, Boston, MA

K. A. Dunn, K. Dovidenko, A.W. Topol, G. Shekhawat, A.E. Kaloyeros, "MOCVD ZnS:Mn Films: Crystal Structure and Defect Microstructure as a Function of the Growth Parameters" Fall 2001 Meeting of the Materials Research Society, Boston, MA

R. Vajtai, B.-Q. Wei, Yu. V. Shusterman, K.A. Dunn, K. Dovidenko, L.J. Schowalter, P.M. Ajayan, "Electrical Characterization of Carbon Nanotube-Metal Contacts" 15th International Vacuum Congress & American Vacuum Society, 48th International Symposium & 11th International Conference on Solid Surfaces, (2001)

K.A. Dunn and K. Dovidenko, "Electron and Ion Beam Microscopy for Interconnect Focus Center Nanotechnology and Metrology," Interconnect Focus Center Review Meeting, Albany, NY, June 2001

K. A. Dunn, K. Dovidenko, A.W. Topol, S.R. Oktyabrsky, A.E. Kaloyeros," MOCVD ZnS:Mn Films: Grain Size Distribution and Crystal Structure as a Function of the Growth Parameters" Spring 2001 Meeting of the Materials Research Society, San Francisco, CA

P.D. Moran, D.M. Hansen, J.G. Cederberg, K.A. Dunn, L.J. Mawst, S.E. Babcock, R.J. Matyi, and T.F. Kuech "A Comparison of Experimental and Calculated HXRD Spectra of Mismatched InGaAs Films Grown on Borosilicate Glass-Bonded GaAs Compliant Structures" The 41st Electronic Materials Conference sponsored by The Minerals, Metals & Materials Society (TMS), Santa Barbara, CA, June 1999

K.A. Dunn, S.E. Babcock, L. Zhang and T.F. Kuech, "Dislocation Microstructure in Lateral Epitaxial Overgrowth (LEO) GaN Deposited by MOVPE," Spring 1999 Materials Research Society Meeting, San Francisco, Apr. 1999

"What is TEM and What Can It Do for You?" invited talk, Materials Science student seminar, University of Wisconsin-Madison, Jan. 1999